Dielectric films for advanced microelectronics
Mikhail Baklanov, Karen Maex, Martin Green
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials.
This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
年:
2007
出版社:
John Wiley & Sons
语言:
english
页:
510
ISBN 10:
0470013605
ISBN 13:
9780470013601
系列:
Wiley series in materials for electronic and optoelectronic applications
文件:
PDF, 10.15 MB
IPFS:
,
english, 2007
Amazon 
Barnes & Noble 
Bookshop.org 
转换文件
更多搜索结果
其他特权 
关键词
关联书单
